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Beijing： 86-10-51668833

Nanjing： 86-25-87100596

E-mail： sales@eastchanging.com

Nanjing

Building 11, Phase 3, Liandong U Valley, No. 7 tonglian Road, Jiangning District

Name： 扩散泵

Date：2019-05-05

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扩散泵

Product introduction：资料待更新········

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Overview
Specifications
Parameter

油扩散泵是获得高真空的主要设备，被广泛用于真空冶炼、真空镀膜、原子能、空间模拟试验和对油污染不敏感的真空系统中。Varian公司作为全世界范围内领先的扩散泵供应商，为客户提供口径从2英寸到35英寸范围内各种扩散泵，是美国唯一的一个全系列的扩散泵供应商。产品具有大抽速，高排气量等特点。适用于真空度在10-1~10-8mbar之间。

特点：

Ø 大抽速、大抽气量

Ø 抗辐射、抗氧化、快速循环.抗爆炸.

Ø 高前级耐压

Ø 高极限真空度

Ø 返油量极低

Ø 超常的使用寿命

扩散泵（AX,HS,VHS,NHS型号）参数对照

型号 AX-65 HS-2 VHS-4 VHS-6 VHS-250

抽速空气，L/s 65 160 750 1550 2125

最大前级耐压Torr/mbar

没有负载

有负载

0.75/1.0

0.6/0.78

0.55/0.72

0.4/0.52

0.65/0.86

0.55/0.73

0.65/0.85

0.55/0.72

0.65/0.85

0.55/0.72

推荐前级泵抽速m3/hr 0.15/0.25 5.0/8.5 10/17 17/28.9 17/28.9

返油率mg/cm2/min

标准冷带 2×10-4 1×10-3 5×10-4 5×10-4 5×10-4

启动时间（min） 7 15 10 10 15

电源 1ph,50Hz,

220V 1ph,50Hz,

240V 1ph,50Hz

240V 1ph,50Hz,

240V 3ph,50Hz,

240V

功率 200/250 450 1450 2200 2200

冷却水l/hr,15-26°C N/A 0.1/20 0.15/30 0.25/50 0.25/50

型号 VHS-10 VHS-400 HS-16 HS-32 NHS-35

抽速空气，L/s 3650 4500 6000 17300 28000

最大前级耐压Torr/mbar

没有负载

有负载

0.65/0.85

0.55/0.72 0.65/0.85

0.55/0.72 0.65/0.82

0.55/0.72 0.50/0.65

0.35/0.45 0.55/0.71

0.40/0.52

推荐前级泵抽速m3/hr 30/51 30/51 80/136 300/510 300/510

返油率mg/cm2/min

标准冷带 5×10-4 1×10-3 1.5×10-3 7×10-4 5×10-4

启动时间（min） 15 30 45 60 －－

电源 3ph,50Hz,

380V 3ph,50Hz,

380V

功率 4400 4400 8100/9600 24000 24000

冷却水l/hr,15-26°C 0.4/80 0.4/80 1.5/300 4.0/800 4.0/800

Last：瓦里安检漏仪 Next：NO

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发布时间： 2019 - 04 - 30