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Name： 瓦里安真空测量设备

Date：2019-05-05

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瓦里安真空测量设备

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Overview
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瓦里安公司生产的真空测量设备包括真空规和真空计，真空规主要有：531和536型热偶真空规，热传导真空规，525型冷阴极真空规，热阴极电离真空规，倒磁控管真空真空规，CT-100型Active低真空规，Eyesys ConvecTorrTM 型Active低真空规，Eyesys Mini-BA Active高真空规，Eyesys Mini-IMG Active高真空规，真空计主要有801型真空计和XGS-600真空计。

一、真空规

（1）531和536型热偶真空规：适合于连续和准确地测量绝对压力为1 x 10-3 torr 至2.0 torr 的真空度,二者均对安装取向没有选择性，而且对压力变化响应快速。

（2）热传导真空规：能够准确测量真空度，也特别适合那些需要快速、重复性地从大气抽空的应用领域。热传导规管不同于常规的对流型规管，系统振动不会对它产生影响。可靠的设计使其能够在0。C 至50。C的范围内准确地读数。

（3）525型冷阴极真空规：测量的真空度范围为 1X10-8 至1X10-2 torr，其测量值准确度高、重复性好、可靠性高。由于没有易烧毁的灯丝，突然暴露大气不会对该规造成任何的损坏。525 规在结构上和倒磁控管真空规类似，因此它可以在非常低的真空度下启动，而常规的冷阴极规在此压力下推测则难以启动。

（4）热阴极电离真空规：有多个系列可供不同用户选择。下面以563标准量程热阴极电离真空计为例来说明。563 型真空计在较大的量程范围（2X10-10 torr 至1X10-3 torr）内表现出色。玻璃腔内壁镀铂，能够屏蔽掉低真空下静电对真空计内部零件的损坏，也可以分流掉随时压力升高积累起来的静电荷。为了延长灯丝的寿命，563型真空计使用镀钍的铱灯丝。同样可以提供参考真空规，小于5X10-6 torr 下密封，用于测试真空规。

（5）倒磁控管真空真空规：不仅能够提供准确而高重复性地真空度数，而且能够应用于恶劣及腐蚀性的环境。真空测量上的性能和 BA 规相近，但清理和维修如同普通冷阴极规一样简单，却没有其他普通冷阴极规在使用中的局限性。它的这些特点使其尤其适合于诸如真空炉等工业系统中 --在这些环境中，耐久性是最重要的指标。适用于超高真空的IMG 倒磁控真空计可测量非常低的真空度，且能够在低至 10-11 torr 的压力下启动。同时，即使还连接着电缆，适用于 UHV 的IMG 真空计也能够耐受非常高的烘烤温度。

（6）CT-100型Active低真空规：可以测量1X10-4 torr至大气压的范围。0.2 秒的快速响应和出众的测量精度，使其成为替换皮拉尼真空计的理想选择。它具有两个以上可以由用户设置两个设定点（set point），当压力达到设定压力的时候，它可以输出触发信号。每一组提示信号包含一个电子输出信号以及LED灯的不断闪动。

（7）Eyesys ConvecTorrTM 型Active低真空规：是一个结构紧凑且经济可靠的压力测试装置。它在1mTorr 到大气压的范围内对压力快速响应，压力触发点可以用数字开关选择（避免模拟调节带来的信号水平不稳），在5 mtorr 至 500 torr范围内共有16 个水平可以设置。Eyesys ConvecTorr 规的另一个显著优点是其可以自动校准。所有组件均装在一个紧凑的盒中，包括真空传感器和所有的控制电路，因此省去了控制器。

（8）Eyesys Mini-BA Active高真空规：是Eyesys ConvecTorrTM 规的高真空版本。Eyesys Mini-BA 的压力测试范围为10 mtorr 至2X10-9 torr，它可以通过模拟或数字信号远程操作。输出的压力信号可通过不同的选件读取，既可以通过LED 直接显示，亦可以为与压力对应得电压模拟信号，或RS-232 /RS-458 串行数据接口。除此之外，使用者可以设置两个SPST参考点以作为过程控制之用。电子流除气为标准功能。

（9）Eyesys Mini-IMG Active高真空规：该系统是基于倒磁控管高真空测量真空计的成熟技术，可以可靠地工作于10-3 torr 至10-9 torr 的使用环境。由于所有的组件均集成在一个装置内，无需另配置外部控制器。它既可将与压力对应得电压模拟输出信号接到计算机或PLC系统即可。

二、真空计

（1）801型真空计：801 型真空计工作稳定而再现性好，主要用于1X10-3 torr 至2 torr 的低真空热偶规测量。该款结构紧凑、重量轻盈,同时配备10英尺长的真空规线缆、6英尺长的电源线缆，以及表头面板上三个用于固定的柱头螺栓。用户可以单独选购瓦里安的531和536 型热偶真空规用于801型真空计。801型真空计的显示为模拟信号显示，面板刻度涵盖主要的真空范围。该控制器同时还可以提供一个模拟输出接口用于在其它设备上记录真空数据。

（2）XGS-600真空计：全新

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